The active vibration isolation platform is a high-end precision support system integrated with high-sensitivity vibration sensing, high-speed signal processing and actuator feedback control. It monitors ambient vibration in real time and applies reverse compensation force actively, which can effectively suppress external vibration interference from low frequency to medium and high frequency bands.
Powerful active low-frequency vibration isolation performance
Multi-degree-of-freedom vibration control
Real-time closed-loop feedback control
Automatic adjustment and self-adaptive capability
Balanced high load capacity and superior stability
Modular design with strong compatibility
Precision optics and spectroscopic systems
Micro-nano processing and semiconductor industry
Scanning probe and nano characterization
Precision metrology and cutting-edge scientific research
Industrial precision inspection
Effectively break through the bottleneck of low-frequency vibration isolation
High-sensitivity and low-noise control
Cooperative vibration suppression in multiple degrees of freedom
Greatly improve system stability
Adaptable to various complex working conditions
Reliable for long-term operation
Model Category | Dimension(mm) | Load-bearing Range | Applicable Fields | 应用案例 |
Mini Active Vibration Isolation Platform | Precision Desktop Application | 600×600 | ≤300kg | ·纳米材料研究 ·表面物理 ·高校与科研院所基础实验室 | ·原子力显微镜(AFM)高分辨成像、 ·扫描隧道显微镜(STM) |
Medium-sized Active Vibration Isolation Platform | Applications for Optics & Micro-nano Processing | 900×1200 | ≤800kg | ·光学工程 ·精密计量 ·微纳制造实验室 | ·高倍光学显微成像系统、 ·激光干涉与精密测量系统 |
Large Active Vibration Isolation Platform | Applications for Semiconductors & High-end Equipment | 1200×1800 | ≤1500kg | ·半导体制造 ·芯片测试 ·精密装备制造 | ·半导体曝光与对准设备、 ·晶圆探针台与测试系统 |
Custom Air-float Optical Table | Complex System & Engineering-grade Applications | Customized as required | Customized as required | ·国家级科研装置 ·精密制造产线 ·大型综合测试系统 | ·多设备集成科研系统、 ·高端制造与检测产线 |
Load capacity: ranging from tens of kilograms to hundreds of kilograms.
Precision: control accuracy up to 0.1 μm or higher.
Vibration isolation frequency range: 0.1 Hz ~ 100 Hz.
Response time: 20 ms - 200 ms, ensuring real-time response to external disturbances.
Equipment Appearance Drawing



Company Address:
Huai'an (Headquarters): No. 7, Meigao Road, Qingpu Industrial Park, Qingjiangpu District, Huai'an City, Jiangsu Province
Suzhou: 4th Floor, Building D, China-Netherlands Innovation Harbor, No. 588 Xiangrong Road, Beihejing Sub-district, Xiangcheng District, Suzhou City, Jiangsu Province
Email:service@abner-nano.com
Contact Number: 13327968688 Mr. Yan

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