The Abner ABS Deep‑UV to Near‑Infrared Microscopic Absorption Spectroscopy Test System is a precision test platform integrating high‑resolution microscopic imaging and broadband spectral analysis. Covering a spectral range of 190 nm‑2500 nm, it enables absorption‑spectrum characterization and in‑situ observation for micro‑area samples. It delivers an integrated analysis solution ranging from micro‑morphology to optical performance for materials science, semiconductors, life sciences and other fields, supporting cutting‑edge scientific research and industrial quality inspection.
Dispersion‑free optical design, micro‑area spectral measurement, motor‑driven polarization control, automatic transmittance‑spectrum calculation; compatible with high‑pressure and low‑temperature test environments.
The ABS Deep‑UV‑to‑Near‑Infrared Microscopic Absorption Spectroscopy Test System is applicable for absorption‑spectrum testing of thin‑film samples within 220‑1700 nm, with a measurement spot size of merely 5 μm. The microscope adopts a deuterium‑lamp‑halogen‑lamp transmission light source with a full‑optical‑path dispersion‑free configuration. It greatly optimizes transmittance in UV and near‑infrared bands and maintains an identical measurement area across all wavelengths. The deuterium‑lamp module adopts a free‑space optical‑path design to enhance light‑source intensity. A single spectrum acquisition takes only 5 ms, enabling fast spectral averaging for higher‑accuracy measurement data.
I. Equipment Specifications
Magnification: 5×, 10×, 20×, 40× objectives; the 40× objective is an achromatic objective.
Light Source: Halogen lamp, deuterium lamp. Wavelength range: 200‑2500 nm. Halogen‑lamp brightness is adjustable; deuterium‑lamp power: 25 W, service life: 2000 hours; halogen‑lamp power: 20 W, service life: 2000 hours.
Sample Stage: Motor‑driven control. XY‑axis travel: 60 mm. Minimum displacement step: 500 nm. Speed range: 0.05‑2 mm/s.
Optical Path: Transmission‑mode optical path. Both illumination and collection paths adopt dispersion‑free design. Equipped with 100 μm UV‑resistant micro‑area optical fiber. Spectral measurement spot size: 5 μm (with 40× achromatic objective), 2 μm (with 100× objective). A motor‑driven shutter is installed in front of light sources; deuterium lamp and halogen lamp can be switched on/off independently.
UV‑NIR Spectrometer: Back‑illuminated fiber‑coupled spectrometer, operating wavelength 250‑950 nm, 2048‑pixel detector, spectral resolution 3 nm, peak quantum efficiency 78%.
NIR Spectrometer: InGaAs array spectrometer, 256‑pixel detector, measurement range 950‑1600 nm, spectral resolution 6 nm.
Optional Functions: 100× semi‑achromatic objective; motor‑driven polarizer (selectable working band: 200‑900 nm or 350‑1700 nm); motor‑driven analyzer (250‑1700 nm).
II. Functional Features
Precise Micro‑area Testing: Minimum test spot diameter ≤2 μm, enabling fixed‑point analysis for micro‑nano devices and heterojunction interfaces.
Multi‑mode Characterization: Realize sample microscopic imaging and absorption‑spectrum acquisition simultaneously; one‑click correlation between morphology and optical performance.
Automated Measurement: Support custom test workflows to complete multi‑point spectral acquisition and data export in batch.
Data Processing: Built‑in modules for baseline correction, spectral fitting and component analysis; automatically generate standardized test reports.
III. Application Scenarios and Fields
Two‑dimensional Materials: Characterize layer‑dependent optical absorption properties of materials such as graphene and black phosphorus.
Semiconductor Devices: Detect photoresist residue, thin‑film thickness and optical uniformity of chips.
Life Sciences: Analyze characteristic absorption spectra of cells and biomacromolecules to support pathological research.
Optical Materials: Test band‑dependent transmittance and absorption performance of optical filters and thin‑film coatings.
IV. Technical Advantages
Broad‑band Coverage: Compatible with both deep‑ultraviolet and near‑infrared measurements, matching characteristic absorption bands of various materials.
High Signal‑to‑Noise Ratio: Adopt high‑sensitivity photoelectric detectors and weak‑signal amplification technology to achieve accurate detection for low‑concentration samples.
Low‑damage Measurement: Low‑power probing light source is applied to prevent photo‑damage to samples during testing.
Modular Design: Expandable with Raman and fluorescence spectroscopy modules to realize multi‑modal joint characterization.
V. Typical Application Cases
Research Institutes & Universities: A research institute utilized this system to discover the special absorption properties of novel two‑dimensional molybdenum disulfide materials in the deep‑ultraviolet band. Relevant achievements were published in Advanced Materials.
Semiconductor Enterprises: A chip manufacturer adopted this system for quality inspection of 7 nm‑process photoresist, reducing the photolithography defect rate by 15% and improving chip yield.
Internal Structure
All optical components in the ABS optical path consist of UV‑coated reflecting mirrors, which are achromatic and deliver high reflectance in the ultraviolet band. Sample displacement is realized by a motor‑driven translation stage to ensure stable movement of samples and substrates during spectral measurement.
Optical‑path Design
A pull‑rod type switcher enables fast switching between spectrometers for measurement. The pre‑calibrated optical path ensures perfect coincidence of measurement positions for the two spectrometers.
Absorption Spectrum Test
With the indicator fiber, the spectral‑collection position can be directly visualized for spectrum measurement of designated areas. The ABS system employs a 100 μm optical fiber to collect transmitted light from samples. Under the 100× objective, the measurement area is merely 2 μm, enabling convenient absorption‑spectrum measurement on designated regions of tiny samples.
Indicator Fiber Image under 50× Objective
Leveraging the advantages of high sensitivity and low noise of the back‑illuminated cooled miniature spectrometer, a single‑spectrum acquisition takes only 5 ms, and multiple‑times spectral averaging can be performed to accurately measure the absorption spectra of samples. For samples with near‑infrared absorption, the ABS system combines the UV‑Vis spectrometer and the near‑infrared spectrometer to conduct tests at fixed positions, achieving perfect stitching of the two spectral curves.
Key Technical Terms
back‑illuminated cooled miniature spectrometer
single‑spectrum acquisition
Test Examples: (a) MoS₂ on sapphire substrate, test range: 200‑1100 nm; (b) Bi₂O₂Se on sapphire substrate, test range: 350‑1700 nm
