The Ebner M series measuring microscope is an industrial optical measuring device launched by Ebona for precision manufacturing and quality inspection scenarios. It is mainly used for high-precision measurement and judgment of geometric dimensions, contour boundaries, hole spacing positions, angles, concentricity and two-dimensional coordinates of workpieces. Adopting the design concept combining high-resolution imaging and a precision motion platform, and equipped with professional measurement software, the system can realize fast focusing, edge recognition, automatic/semi-automatic measurement and data output, meeting application requirements such as workshop quality inspection, laboratory metrology and R&D verification. The M series supports an integrated solution of upright measurement structure and digital imaging. It can be flexibly configured with X-Y platforms of different ranges, encoder accuracy, objective lens magnifications and lighting modes according to the size and accuracy requirements of measured parts, balancing efficiency, stability and scalability.
1. Core Features
High-precision 2D Measuring Platform: Equipped with precision guide rails and high-resolution encoders, it delivers high repeat positioning accuracy and stable measurement.
Multiple Measurement Modes: Supports 2D geometric measurements including points, lines, circles, arcs, angles, distances, hole spacing and position tolerance; auxiliary height/depth-of-field measurement is optional.
High-definition Digital Imaging + Software Measurement: Real-time imaging, edge extraction, optional auto-focusing, result statistics and report export.
Multi-lighting Combination for Complex Workpieces: Transmitted and reflected (coaxial/ring) lighting combinations, suitable for transparent parts, metal parts, reflective parts, etched structures and more.
Modular Expansion: Optional motorized stage, automatic edge finding, barcode input, MES/ERP data integration and other functions to improve quality inspection efficiency.
## II. Technical Specifications (Typical Configuration)
1) Optical System
Optical System: Infinity-corrected optical system / Telecentric measurement optics (optional); Observation Mode: Upright measurement; Imaging Mode: Visual observation (optional) / Digital imaging as primary; Zoom Method: Fixed-magnification objective / Continuous zoom (optional)
2) Objectives and Magnification (Typical): Objective Magnification: 1× / 2× / 5× / 10× / 20× / 50× (selectable on demand); Total Magnification: 20×–500× (depends on camera, eyepiece and display magnification); Working Distance: Long working distance objective (optional); Field of View: Varies with magnification (configuration sheet available)
3) Measuring Stage and Travel Range (Typical): X-Y Stage Type: Precision cross stage (manual / motorized optional)
Travel Range (optional sizes): 200 × 100 mm; 300 × 200 mm; 500 × 400 mm (customized); Z-axis Focus Travel: ≥ 50 mm (larger travel optional); Stage Load Capacity: ≥ 5 kg (higher load optional)
4) Displacement Readout and Accuracy (Typical)
Displacement Measurement: Grating scale / Linear encoder; Resolution: 0.5 µm / 1.0 µm (optional); Indication Error: ≤ (3 + L/200) µm (typical, L stands for measured length in mm); Repeat Positioning Accuracy: ≤ 2 µm (typical)
5) Imaging System (Standard / Optional)
Camera Type: Industrial CMOS (USB3.0 / HDMI / GigE optional)
Resolution: ≥ 5 MP (12 MP / 20 MP optional)
Frame Rate: ≥ 30 fps (depends on resolution and interface)
Image Display: PC software / Industrial monitor (optional)
6) Illumination System
Reflected Illumination: Ring LED (standard) / Coaxial illumination (optional)
Transmitted Illumination: Bottom LED transmitted light source (optional)
Brightness Adjustment: Continuously adjustable
Polarization / Dark Field: Optional (to enhance contrast of edges and surface defects)
7) Functions of Measurement Software
Geometric Measurement: Point, line, circle, arc, angle, distance, hole spacing, slot width, radius; Edge Detection: Grayscale threshold / Sub-pixel edge finding (optional); Coordinate System Functions: Workpiece coordinate setup, datum alignment, array measurement; Data Export: Excel/PDF report, image/video archiving; Statistical Analysis: SPC (optional), batch management of measurement results; Communication Interface: Barcode scanner / Serial port / Network port connection (optional)
8) Electrical and Environmental Requirements: Power Supply: AC 100–240 V, 50/60 Hz; Operating Temperature: 15–30 ℃ (constant temperature recommended); Relative Humidity: 30%–70% (non-condensing)
### III. Typical Applications
Precision part dimension inspection: hole diameter / hole pitch / slot width / step / chamfer
Semiconductor and micro-nano fabrication: photolithography patterns, etched structures, scribe lines, pad dimensions
Mold and cutting tool inspection: contour, angle, tool tip morphology
PCB / FPC: line width and spacing, alignment marks, opening dimensions
Optical components: aperture, outer profile, scribed lines, auxiliary judgment of edge defects
precision measuring tools
