I. Product Overview
The Ad series glovebox is a core anhydrous and oxygen-free operation device developed by ABN for scientific research and industrial production. Its key advantages include dual-column continuous purification, ultra-low water and oxygen control (<1ppm), SIEMENS-PLC intelligent control and high-sealing modular design. It addresses the challenges of safe handling and high-precision testing of water-oxygen sensitive samples in fields such as advanced semiconductor packaging, lithium battery material synthesis and special material research and development. It supports integration with X-ray sources, laser welding and other equipment, meeting full-scenario requirements ranging from laboratory research to mass production lines.
II. Equipment Specifications
transition chamberEnvironmental Requirements
| Parameter category | Specific parameters |
|---|
| Box structure | 304 Stainless steel, thickness 3mm; oil film wire drawing on inner surface, stainless steel / custom paint finish on outer surface |
| Standard size | Single station：1220×750×900mm（2 pairs of gloves）；多工位：1500/1800×750/1000×900mm（3-4 pairs of gloves） |
| Front window configuration | 8mm Tempered safety glass, tilted window, detachable |
| Glove Interface | POM Material, diameter 220mm; butyl rubber gloves (thickness 0.4mm, diameter 7-8 inches) |
| Water and Oxygen Control | Water content ＜1 ppm, oxygen content ＜1 ppm; leak rate＜0.001 vol%/h |
| Purification System | Dual-column Purifier (5kg Copper Catalyst + 5kg Molecular Sieve), oxygen removal capacity 60L, water removal capacity 2kg; supports automatic switching for regeneration |
| vacuum pump | Rotary vane pump, pumping speed 8m³/h, ultimate vacuum≤2×10⁻²mbar |
| control system | SIEMENS- PLC +Touch screen, supporting remote monitoring and IoT management |
| Large chamber: φ360×600mm; Small chamber: φ150×300mm, double-door sealing, automatic / manual control |
|
| Work pressure | ±15mbar Adjustable, automatic pressure balancing and protection |
| working gas | Argon, nitrogen, helium (99.999% purity) |
| Temperature: 10–35°C, Humidity ≤70% (no condensation) |
|
III. Product Features
Ultra-high purity and environmental stability: The dual-column purification system switches and regenerates automatically, ensuring long-term H₂O/O₂ levels below 1 ppm for long-term handling of sensitive materials.
Modular and flexible configuration: Single/multi-station and single-sided/double-sided operation options are available. Custom dimensions are supported, and integration with X-ray sources, welding equipment and other devices is compatible.
Intelligent control system: SIEMENS PLC + touch screen for real-time monitoring of water, oxygen, pressure and temperature. An optional IoT module enables remote control, data traceability and fault early warning.
High sealing performance and easy maintenance: Multi-layer O-ring sealing delivers an extremely low leak rate. Replaceable core components reduce maintenance costs, and "non-stop" regeneration is supported.
Safety and compatible design: Built-in overpressure protection, vacuum interlock and gas leakage alarm. It matches the interfaces and radiation protection requirements of equipment such as UNOS-U160B.
IV. Technical Advantages
Dual-column continuous purification technology: Dual columns operate alternately to maintain uninterrupted purification during regeneration, guaranteeing continuity of production and experiments and preventing sample oxidation and moisture absorption.
High-precision water and oxygen control: Composite purification using copper catalyst and molecular sieve, combined with precise flow and pressure control, stabilizes water and oxygen content below 1 ppm, exceeding industry standards.
Intelligent operation and maintenance system: Real-time monitoring of parameters including water, oxygen, pressure and vacuum degree. Automatic protection and early warning are triggered upon abnormalities. Remote diagnosis and data traceability are available to improve equipment availability.
High-sealing modular design: Modular cabinets facilitate expansion and integration. The high-sealing structure reduces inert gas consumption and is suitable for installation in clean rooms and production lines.
Domestic independent controllability: Self-developed core components provide short delivery cycles and rapid after-sales response, supporting customized requirements for industries such as semiconductors and new energy.
V. Application Scenarios and Fields
Semiconductor and Microelectronics Manufacturing
Advanced Packaging: 2.5D/3D packaging and TSV through-silicon via processing, which ensures the quality of micro-bumps and bonding wires under anhydrous and oxygen-free environments.
Wafer Processing: Surface treatment and defect inspection of wafers with 28nm and below processes, compatible with UNOS-U160B high-precision imaging.
Power Devices: Internal structure inspection for thick-layer packaging of IGBTs, MOSFETs and other components to guarantee reliability under high power.
New Energy Material R&D and Production
Lithium Batteries: Electrode material synthesis, electrode sheet preparation and cell assembly to prevent moisture from impairing battery performance and safety.
Solid-State Batteries: Electrolyte preparation and packaging; anhydrous and oxygen-free environments avoid interfacial side reactions.
Fuel Cells: Treatment of proton exchange membranes and catalysts to ensure material stability and durability.
Special Materials and Chemical Industry
Nanomaterials: Synthesis of metallic nanoparticles and two-dimensional materials to prevent oxidative agglomeration and preserve material properties.
Organic Synthesis: Sensitive organic reactions (e.g., Grignard reactions) and synthesis of active pharmaceutical intermediates; anhydrous and oxygen-free conditions improve yield and purity.
Superalloys: Powder processing and forming of titanium alloys and nickel-based alloys for aerospace applications to avoid oxidation defects.
Scientific Research and Laboratories
Materials Science: X-ray diffraction (XRD) and electron microscope sample preparation; inert environments maintain the original state of samples.
Life Science: Anaerobic microbial culture, freeze-drying and encapsulation of biological samples; anhydrous and oxygen-free environments extend storage life.
Nuclear Technology Research: Radioactive sample handling with sealed operations to protect personnel safety and environmental cleanliness.
Other High-End Applications
Medical Devices: Packaging and testing of implantable medical devices (such as pacemakers) to ensure sterility and stability.
Optoelectronic Industry: Preparation of OLED materials and quantum dots; anhydrous and oxygen-free environments improve device luminous efficiency and service life.
Precision Inspection: Integrated with UNOS-U160B to realize non-destructive testing of sensitive samples, such as structural analysis inside semiconductor packages.
Equipment Diagram
