The inverted metallurgical microscope features a structural design with objectives positioned below the sample. The sample can be placed directly on the stage for observation without inversion or special clamping. This design is particularly suitable for large-sized, heavy or difficult-to-cut specimens, such as wafers, molds, castings and mechanical parts. Inverted metallurgical microscopes deliver outstanding advantages in industrial inspection and the semiconductor industry.
Technical Parameters
1. Optical Parameters
Eyepiece: Wide-field achromatic SWF10X (Φ22mm).
Objective Lens: Infinite-distance long-working-distance plan achromatic objectives (uncovered), including LMPIan 5X/0.12 DIC (working distance: 15 mm) and other models with varying numerical apertures and working distances.
Observation System: Differential interference contrast plates are applicable to partial objectives; the eyepiece tube is inclined at 45°, with an interpupillary distance adjustment range of 53–75 mm.
2. Mechanical Parameters
Focusing Mechanism: Coaxial coarse and fine focusing with locking and limiting devices; fine focusing graduation: 2.0 μm.
Stage: Mechanical movable stage; overall dimension: 242 mm×200 mm, moving range: 30 mm×30 mm. The maximum outer diameter of the circular rotating stage plate is Φ130 mm, and the minimum light aperture is less than Φ20 mm.
3. Illumination Parameters
12V 50W halogen lamp with adjustable brightness; built-in field diaphragm, aperture diaphragm and pull-type polarizer.
II. Functional Features
Inverted metallurgical microscopes are usually equipped with a large-travel and high-load stage to stably support heavy specimens. The microscope supports multi-channel imaging and digital image acquisition, facilitating large-area scanning and quantitative analysis. The system can be integrated with autofocus, motorized stage and on-line inspection systems to meet the requirements of industrial automatic detection.
III. Application Scenarios and Fields
In the field of semiconductor manufacturing, inverted metallurgical microscopes are widely used for wafer surface defect inspection, process evaluation and failure analysis. In the machinery manufacturing industry, this equipment is suitable for observing the surface microstructure of molds, castings and large mechanical components. On production lines, inverted metallurgical microscopes serve as essential devices for quality control and process monitoring.
IV. Technical Advantages
No sample inversion or complex sample preparation is required, ensuring high detection efficiency. It features strong adaptability to large-size and heavy specimens, and can be easily integrated with automated and information-based systems. It is suitable for continuous and batch inspection in industrial environments.
V. Typical Application Cases
Microscope Type
Application Fields
Typical Samples
Application Instructions
Inverted Metallurgical Microscope
Materials Science Research
Steel, Aluminum Alloy
Used for the analysis of grain size, phase structure and heat-treated microstructure.
Upright Metallurgical Microscope
Teaching and Scientific Research
Standard Metallographic Specimens
Used for metallographic experiment teaching and basic research.
Inverted Metallurgical Microscope
Inverted Metallurgical Microscope
Silicon Wafer, Wafer
Used for surface defect inspection and process evaluation.
Inverted Metallurgical Microscope
Industrial Quality Control
Molds, Castings
Used for surface microstructure and defect analysis of large workpieces.
Note: The above configurations can be customized and adjusted according to users' experimental requirements.
Micrograph of MoTe₂ under Metallurgical Microscope
