CRXK is a liquid-helium-free closed-cycle cryogenic probe station developed by ABN. This system combines the ease of liquid-helium-free operation with the outstanding measurement performance of Lake Shore products. Equipped with an independent closed-cycle refrigerator, it can cool down to low temperatures unattended after startup. A wide range of optional accessories and configurations for the CRXK enable researchers to carry out precise and demanding measurements. The probe station can reach a minimum temperature of 4.5 K, and multiple thermometers installed inside it guarantee accurate and repeatable measurements. Its two-stage closed-cycle refrigerator keeps samples at a relatively high temperature during cooling, reducing the risk of sample condensation — a critical requirement for measuring organic materials. The CRXK can be customized to accommodate wafers with a diameter of up to 102 millimeters (4 inches), featuring a probing area of 51 millimeters (2 inches) in diameter.
I. Main Parameters and Descriptions
| Temperature range |
|
| Install 2 probe arms | Base temperature 4.5K, control range5K~350K |
| Install 4 probe arms | Base temperature 5.5K, control range6K~350K |
| Install 6 probe arms | Base temperature 6.0K, control range6.5K~350K |
| Select the PS-HTSTAGE accessory (incompatible with sample backside bias) | Base temperature 20K, control range20K~675K |
| Temperature stability |
|
| Base Temperature (No Heating Control) | Not specified |
| ＜10K | ±50mk |
| 10K~100K | ±10mk |
| 101K~250K | ±10mk |
| 251K~350K | ±20mk |
| 351K~675K | ±50mk |
| vacuum | Take the TPS-FRG molecular pump unit as the standard |
| Vacuum pumping time | 30min(＜1x10﹣3Torr) |
| room temperature | ＜5X10﹣4Torr |
| Base temperature | ＜1X10﹣5Torr |
| Maximum temperature | ＜1X10﹣5Torr |
| Cycle Time |
|
| Main Loop | 4h |
| vacuum pumping | 0.5h |
| Probe Station Cooling | 2h |
| Probe station temperature rise | 1.5h |
| Sample |
|
| Maximum size | 51mm(2inch) |
| Sample backlight interface | Not selectable |
| Sample rotation | Not selectable |
Sample vibration| ＜1um |
|
| Probe Configuration |
|
| Maximum number of probes | 6 |
| Probe Arm Thermometer | Used to monitor the temperature of the probe arm |
| Cooling probe bracket | ＜20K（The sample is at the base temperature） |
| Probe bracket | Connect the sample stage heat sink |
| Probe Arm Bracket Connect the radiation shielding screen heat sink |
|
| DC/RFprobe Electrical insulation > 100 GΩ for floor drain point measurement |
|
| Microwave Probe Frequency range from DC to 67 GHz |
|
| Optical Fiber Probe Can be used for electro-optic measurement |
|
| Needle drop range All probes can perform needle drop tests within a circle with a diameter of 25.4 millimeters (one inch). |
|
II. Application Scenarios & Fields
Quantum Materials and Devices
Low-temperature transport and quantum property characterization of quantum dots, quantum wires and superconducting devices, including superconducting transition temperature measurement and quantum tunneling effect testing.
Semiconductor R&D
Low-temperature I-V/C-V characterization, reliability and failure analysis of advanced-process MOSFETs, FinFETs, GaN HEMTs and other components, compatible with low-temperature high-frequency parameter verification.
RF and Microwave Testing
Low-temperature S-parameter (return loss / insertion loss) and noise figure testing for 5G/mmWave chips and RF front-end devices to guarantee signal integrity under cryogenic conditions.
Optoelectronics and New Energy
Low-temperature photoelectric response testing of infrared detectors and quantum dot lasers; research on low-temperature carrier dynamics of organic semiconductors and perovskite materials.
Academic and Frontier Research
Low-temperature property research on nanoelectronics, spintronics and two-dimensional materials (e.g., graphene, MoS₂) for universities and research institutes.
III. Core Functional Features
Liquid-He-Free Cryogenic Temperature ControlDual-stage CCR refrigeration, temperature range from 4.5 K to 350 K (675 K high-temperature option available). The cooling process maintains sample heating to suppress condensation, suitable for organic materials and sensitive devices. Compliant with Lake Shore Cryotronics standards.
Vacuum and Environmental ControlBase vacuum level up to 10⁻⁵ Torr. Optional 0.19 T solenoid magnetic field. Thermal radiation shield improves cooling efficiency. Sample vibration less than 1 μm across X/Y/Z axes at all temperature ranges.
Precision Positioning and MeasurementUp to 6 ultra-stable micro-manipulated probe arms. 3D positioning plus ±5° rotation for microwave probes. Compatible with DC/RF/microwave/optoelectronic measurements, supporting single-ended and differential signals.
Automation and CompatibilitySupports unattended cooling and automatic calibration. Integratable with source meters, oscilloscopes and lock-in amplifiers for nanoelectronic, quantum device and RF chip testing. Compliant with Lake Shore Cryotronics standards.
Operation, Maintenance and SafetyZero liquid helium consumption, fast thermal response and easy sample replacement. Multiple temperature sensors ensure repeatability and stability of measurements.
IV. Typical Models & Application Cases
Core Models
CRXK (Standard Version): 4.5 K ~ 350 K, 6 probe arms, 51 mm probing area, vacuum level 10⁻⁵ Torr, compatible with 2-inch wafers.
CRXK-High Temp: Extended high-temperature limit up to 675 K, for thermal stability testing of materials under wide temperature ranges.
CRXK-Magnetic: Equipped with 0.19 T solenoid magnetic field, dedicated to spintronics and magnetoelectric coupling device testing.
Application Cases
Case 1 (Quantum Device R&D)A quantum computing laboratory adopted the CRX-4K to test superconducting qubit chips. Energy level transition and coherence time were measured at 4.5 K. Liquid-helium-free design and ultra-low vibration guaranteed stable testing, cutting R&D cycle by 40%.
Case 2 (Semiconductor High-Frequency Testing)An RF chip manufacturer used the CRX-4K paired with microwave probes to characterize GaN HEMTs. Noise figure and power performance were verified at 77 K to identify parameter drift under cryogenic conditions, boosting mass production yield by 25%.
Case 3 (Two-Dimensional Material Research)Westlake University utilized the CRX-4K to characterize low-temperature transport properties of graphene/BN heterostructures. High-impedance measurement was realized with a lock-in amplifier, revealing the variation law of electron mobility at low temperatures.
