Compatible with both vacuum and non-vacuum test environments; compatible with any fiber-coupled light source, capable of generating homogenized laser spots or focused laser spots with a variety of optional modules.
The E2-Vac vacuum environment optoelectronic test system features all the functions of a conventional probe station (i.e., electrical testing), along with a specially optimized optical structure design, delivering an all-in-one solution for optoelectronic testing under vacuum and non-vacuum conditions.
It supports both vacuum and non-vacuum testing environments. The ultimate vacuum of the vacuum chamber reaches 5*10⁻⁵ mbar, and the compatible scroll dry pump achieves an ultimate vacuum of ＜5*10⁻² mbar (5 Pa). A molecular pump can be upgraded to attain an ultimate vacuum of 8*10⁻⁸ mbar.
The ultra-short probe space is compatible with objective confocal optical paths, enabling simultaneous observation of the device microstructure and laser morphology.
Continuous switching among multiple objectives is supported, with up to 50× objective lens available to achieve μm-level focused spots with adjustable spot size. The laser spot can be moved to select test areas while probes are in contact.
Compatible with a wide range of test light sources including lasers, xenon lamps, LEDs, supercontinuum lasers and more, covering wavelengths from 250 nm to 5500 nm.
High-shield triaxial wiring configuration with triaxial leakage current below 100 fA.
Equipped with a low-noise photocurrent test module to meet diverse photocurrent testing requirements. The bundled Metatest Suite test software package innovatively integrates control functions for all optical and electrical test instruments, and supports arbitrary combinations for custom parameter sweeping, greatly simplifying the testing workflow.
Main configuration*：
* Device parameters are for reference only. Please refer to the quotation document for details.
Structural Design:
Samples can be vacuum-adsorbed onto the sample stage to prevent sample displacement during probing.
The probe station is equipped with 2 triaxial high-precision probe holders and 1 SMA high-speed probe holder.
Multi-objective switching enables continuous objective lens change to adjust the appropriate laser irradiation spot size.
A vortex dry pump provides a vacuum test environment.
The stacked optical path design allows installation of up to 4 optical modules. Each optical module can realize different optical functions, such as coupling laser into the optical system or measuring the electroluminescence spectrum of samples.
SMA, FC/PC and FC/APC fiber interfaces are provided, and the interfaces can be replaced as required.
Fast attenuation function: the combined use of a six-hole manual attenuation wheel and a pull-rod OD3 attenuator switch enables laser intensity attenuation adjustment covering 6 orders of magnitude.
Each layer of the optical path is fixed via dovetail grooves for rapid expansion of new functions.
The microscopic imaging unit can move independently to change the observation area during probing tests.
Introduction to Photocurrent Test Function
The E2-Vac microscopic optical system adopts normal incident light. It is equipped with a uniform spot illumination module that converts laser or LED light sources into uniform small spots to irradiate samples. Under optical microscopic imaging, the objective lens focuses the light spot. The spot size is adjustable within the range of 8–800 μm with good uniformity, and the optical power density reaching the sample can be up to 105 mW/cm² (520 nm multimode laser). A point laser illumination module can be optionally added to directly focus laser on the sample surface to form a tiny Gaussian spot with a diameter of approximately 1 micron.
The E2-Vac system adopts a high-shielding triaxial wiring scheme to deliver an accurate and reliable electrical test platform. The triaxial leakage current is less than 100 fA (about 20 fA measured with a 4200 semiconductor parameter analyzer). The Metatest Suite software package centrally controls all test devices in the system. It supports simultaneous measurement of 3 parameters, and parameter scanning of 2 sets of parameters for each measured parameter. During testing, the laser intensity can be measured at any time and the applied optical power can be adjusted.
