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艾博纳微纳米科技(江苏)有限责任公司

Eall:service@abner-nano.com

Contact Number: 13327968688  Mr. Yan

English Translation

Company Address:Huai'an (Headquarters): No. 7 Meigao Road, Qingpu Industrial Park, Qingjiangpu District, Huai'an City, Jiangsu ProvinceSuzhou: 4th Floor, Building D, China-Netherlands Innovation Hub, No. 588 Xiangrong Road, Beihejing Sub-district, Xiangcheng District, Suzhou City, Jiangsu Province

Dongguan: Room 4216, 42nd Floor, Dongjiang Star Commercial Building, Dongguan City, Guangdong Province


Plasma Cleaning Machine

Plasma Cleaning Machine

  • Category:Spin Coater / Heating Equipment
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  • Release time:2025-12-05 10:12:48
  • Product description

1. Product Overview

The ABNONA Plasma Cleaner (ABN-PCM-001) is an advanced equipment for surface cleaning treatment, applicable to surface cleaning of a variety of materials. It works on the principle of plasma action to clean material surfaces and efficiently remove contaminants such as organic substances and oxides. The cleaning process can be completed at low temperature to avoid damage to materials.

2. Functional Features

  1. High-efficiency Cleaning: It realizes non-destructive cleaning at the nanometer level, eliminating residues and damages caused by traditional wet cleaning.

  2. Surface Activation: It greatly improves the surface energy of materials and optimizes the consistency of subsequent processes such as coating, bonding and cladding.

  3. Controllable Process: Parameters including power, gas type and treatment time can be precisely adjusted with high repeatability.

  4. Wide Compatibility: Compatible with various substrates such as metals, semiconductors, glass and polymer materials.

  5. Eco-friendly & Safe: No chemical solvents required, reducing pollution and waste liquid disposal costs.

3. Application Scenarios & Fields

  • Semiconductor & Microelectronics: Wafer cleaning, pre-photolithography treatment, surface activation before packaging.

  • Optics & Precision Manufacturing: Pre-coating treatment for lenses, optical filters and optical components.

  • Biomedical Industry: Surface modification of medical implants, petri dishes and chip experimental vessels.

  • New Materials & Scientific Research: Research on two-dimensional materials, flexible electronics and functional thin films.

  • Industrial Manufacturing: Surface treatment of plastic parts before spraying and bonding.

4. Technical Advantages

  1. Low-temperature Treatment: Suitable for temperature-sensitive materials without causing thermal damage.

  2. Excellent Treatment Uniformity: Stable plasma distribution, ideal for large-area samples and complex structural parts.

  3. Wide Process Window: Supports multiple process modes including cleaning, etching, activation and surface modification.

  4. Stable and Reliable System: Capable of long-term continuous operation with low maintenance costs.

  5. Strong Scalability: Configurable with RF, microwave or atmospheric plasma sources as required.

5. Typical Models & Application Cases



Application Grade

Model

Core Features

Applicable objects

Advantages

Application Cases

Laboratory General-purpose Plasma Cleaner (Mini Type)

PC-100

PC-200

PC-300

Cavity volume:5–20 L

Plasma method: Low-temperature radio frequency plasma

Supporting gas:Ar / O₂ / Air

Power range:0–100 W

Control mode: Touch screen or knob control

·高校实验室

·材料/化学/生物研究

·样品前处理

  • Easy operation

  • Low maintenance cost

  • Minimal damage to samples

Material research, sample pretreatment

Semiconductor & Micro-nano Processing Plasma Cleaner (Medium Type)

PC-500

PC-800

PC-1000

·Cavity volume:30–100 L

·Support multi-gas channels(Ar / O₂ / N₂ / CF₄)

·Power range:0–300 W

·Programmable process parameters

·Support wafer tray(2–6 inch)  

  • Micro-nano Processing Laboratory

  • MEMS / Sensor R&D

  • Semiconductor Process Pretreatment

  • High process stability

  • Excellent cleaning uniformity

  • Good repeatability


Wafer, MEMS,Two-dimensional materials

Industrial Automated Plasma Cleaning System (Large Type)

PC-2000 PC-3000 PC-AUTO

·腔体容积:>150 L

·支持大尺寸样品或批量处理

·自动进出料接口

·工艺数据记录与导出

·可对接产线或手套箱

  • Mass production line

  • Packaging and bonding process

  • Demand for high-consistency surface treatment

 

  • High throughput

  • High consistency

  • Stable 7×24 hours continuous operation


Mass production, production line integration


VI. Technical Parameters

  1. Visual touch screen: Real-time monitoring of process parameters.

  2. Gas types: Supports argon, oxygen, hydrogen, nitrogen and fluorinated gas.

  3. Gas channels: Equipped with dual-channel process gas.

  4. Flow control: Dual gas flow control with adjustable proportion.

  5. Precision: High-precision flow monitoring system.



General Laboratory Plasma Cleaner (Mini Type)

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Semiconductor & Micro-nano Processing Plasma Cleaner (Medium Size)

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Industrial Automatic Plasma Cleaning System (Large Size)

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Company's main business: scientific research instruments, high-end microscopic equipment and transfer equipment.

Contact Us

Company Address:

Huai'an (Headquarters): No. 7, Meigao Road, Qingpu Industrial Park, Qingjiangpu District, Huai'an City, Jiangsu Province

Suzhou: 4th Floor, Building D, China-Netherlands Innovation Harbor, No. 588 Xiangrong Road, Beihejing Sub-district, Xiangcheng District, Suzhou City, Jiangsu Province

Email:service@abner-nano.com

Contact Number: 13327968688  Mr. Yan

              

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