I. Product Overview The Fully Automatic Wafer Prober (ABN-PRO-001) is a high-precision automated testing equipment specially developed for the microelectronics and semiconductor industries. Equipped with an advanced automatic control system, it delivers high-precision probe positioning and sample handling, and is widely adopted for integrated circuit testing, chip characterization and material analysis. Fitted with high-performance CCD cameras, automatic control software and an intelligent operation interface, this fully automatic prober delivers accurate and efficient testing solutions to meet the demands of cutting-edge scientific experiments and industrial manufacturing. Thanks to its outstanding stability and flexibility, it serves as an essential instrument for both research laboratories and mass production lines.

Technical Specifications

1. Optical Platform

Dimensions: 60 cm × 60 cm, compatible with various testing requirementsEquipped with high-definition industrial CCD, supporting long focal magnifications of 5X, 10X, 20X and 50X

2. Microscope System

Fitted with three-axis high-precision CCD (replaceable to fit diverse optical configurations)Microscope system standard configuration: integrated ring light and backlight illumination system for clear imaging

3. Probe Station Functions

• Lifting stage: Electric lifting with adjustable travel speed (0.02–4 mm/s)

• XY axes: Electric adjustment, 50 mm × 50 mm control range, 360° rotation supported

• Z axis: Electric adjustment with a maximum travel of 200 mm

4. Working Stage

Maximum sample dimension: 65 mm × 65 mm, suitable for most materials and sample typesMaximum sample weight: 4 kg

5. Control System

Supports XBOX controller and software control to streamline operation proceduresElectric control: Switchable between automatic and manual modes to meet diverse experimental demands

6. Environmental Requirements

Temperature range: 0°C to 40°CHumidity range: ≤80% RH

7. Display & Operation Interface

Comes with a high-definition display (780 mm × 600 mm) for real-time data monitoring and visualizationMultiple software functions available to improve testing accuracy and flexibility

II. Functional Features

1. Fully automatic XYZ multi-axis electric stage enables precise positioning and repeatable movement of probes and samples.

2. Automatic probe contact and lift control reduces interference of manual operation on test results.

3. High-stability probe holder system supports synchronous testing with multiple probes.

4. Coaxial alignment via microscopic observation system for accurate identification of test areas.

5. Centralized software control and parameter management support automated test procedures.

6. Multi-stage safety interlock and limit protection ensure the safety of equipment and samples.

III. Application Scenarios & Fields

1. I-V, C-V and reliability testing of semiconductor devices

2. Functional and contact performance testing of MEMS devices

3. Electrical transport and device performance research of two-dimensional material devices

4. Construction of automated test platforms for universities and research institutes

5. Repeatability verification and parameter statistics of novel device processes

IV. Technical Advantages

1. High automation level greatly improves test efficiency and data consistency. The coordinated operation of the electric stage and software enables automatic execution of test procedures, eliminating uncertainties caused by manual operation, and is suitable for mass testing and statistical analysis.

2. High-precision motion control and stable contact mechanism guarantee test reliability. The system integrates high-resolution motion control and fine contact adjustment functions to maintain stable contact between probes and device electrodes.

3. Coordination of microscopic observation and automatic alignment enhances test accuracy. Combined with microscopic imaging and automatic alignment algorithms, the system achieves precise positioning of tiny test areas.

4. Compatibility with multi-probe and multiple configurations delivers a wide range of applications. It supports multi-probe layout and various test setups to meet diverse device structures and testing requirements.

5. Powerful centralized software control and data management. Test procedures, parameters and results can be managed uniformly, facilitating sorting and traceability of research data.

6. Suitable for long-term stable operation in scientific research and pilot production stages. The equipment design balances flexibility and long-running stability, providing a reliable platform for research and engineering testing.

V. Typical Application Examples

Note: The above configurations can be customized and adjusted according to users' experimental requirements.

MEMS Automated Device Testing

Equipment appearance drawing