I. Product Overview

ABONA CGO High-Low Temperature Vacuum Probe Station is developed to meet high-precision electrical testing requirements in the fields of semiconductors, MEMS, optoelectronic devices and microelectronics.It delivers precise electrical measurement performance and supports a wide range of electrical characteristic tests including IV/CV, S-parameter and dark current under vacuum conditions. Equipped with microscopic observation capability, it is suitable for scientific research, laboratory testing and production applications.

Title：Technical Specifications

Note: All above values are typical figures. The final parameters shall be subject to the technical agreement and factory inspection certificate.

II. Functional Features

1. Vacuum chamber structural design: Enables device testing under vacuum or low-pressure environments to greatly reduce environmental interference.

2. Precision XYZ motion stage: Realizes high-accuracy position adjustment and repeat positioning of samples and probes.

3. Multi-probe configuration capability: Supports single-probe or multi-probe synchronous testing to meet the test demands of complex devices.

4. Vacuum electrical test interfaces: Multiple electrical signal lead-out ports are reserved for convenient connection with test instruments.

5. Compatible microscopic observation system: Can be matched with stereomicroscopes or metallurgical microscopes for real-time observation.

6. Chamber sealing and safety design: Guarantees vacuum stability and safety during testing.

III. Application Scenarios & Fields

1. I-V, C-V and reliability testing of semiconductor devices under vacuum conditions.

2. Functional and contact performance testing of MEMS devices under low-pressure or vacuum environments.

3. Electrical transport research on environment-sensitive properties of two-dimensional material devices.

4. Parameter evaluation and comparative experiments of novel devices under controlled environments.

5. Construction of vacuum electrical test platforms for universities and research institutes.

IV. Technical Advantages

1. Controllable vacuum environment greatly improves test reliability. Featuring stable chamber pumping and sealing structure, this vacuum probe station effectively reduces the interference of air, moisture and impurities on test results, and delivers reliable testing conditions for environment-sensitive devices.

2. Integration of precision motion and stable contact mechanism. The equipment integrates a high-precision motion stage and probe adjustment mechanism, which maintains stable contact between probes and samples even under vacuum, improving test repeatability and data consistency.

3. High test flexibility with compatibility for multi-probe and multi-interface setups. It supports various probe configurations and multi-channel electrical signal output, meeting the requirements of complex devices and synchronous multi-parameter testing.

4. Collaborative design of microscopic observation and vacuum testing. Probe manipulation and microscopic observation are completed within one integrated system, helping boost positioning accuracy and operation efficiency.

5. Suitable for long-term stable operation in scientific research and engineering verification. The structural design and material selection of the equipment balance vacuum adaptability and long-term reliability, satisfying continuous operation demands for laboratory research and engineering testing.

V. Typical Application Examples

Note: The above configurations can be customized and adjusted according to users' experimental requirements.

Application and schematic diagram of vacuum cavity structure