1. Product Overview

The ABN CS Compact Probe Station is equipped with a compact vacuum test chamber, primarily designed for electrical signal testing of gas-sensitive materials and other environment-sensitive materials.A stainless steel heating stage is installed inside the test chamber, with a working area of φ26×26 mm. The stage supports a temperature range from -190 °C up to 400 °C.Micro 3-axis movable tungsten probes are mounted around the stage, making the system ideal for testing tiny unpackaged sensors such as interdigitated electrodes.The chamber is fitted with a gas inlet and vacuum pumping port. A mechanical pump can achieve a vacuum level below 5 Pa, while a molecular pump delivers vacuum below 3 Pa.Military-grade vacuum electrical feedthroughs are adopted for vacuum signal connections to guarantee airtightness and anti-interference performance.

During operation, place the device under test on the heating stage. Manually adjust the 3-axis movable probes to align their tips with the electrodes of the test device, then connect external signal wires to measurement instruments to acquire electrical signals.

Key Technical Specifications

1. Temperature Range: -190 °C to Room Temperature; Room Temperature to 400 °C

2. Temperature Display: 7-inch HMI touch screen

3. Temperature Control Accuracy: ±0.5 °C

4. Thermocouple Sensor: High-precision PT100

5. Temperature Control Mode: Standard PID control with auto-tuning function

6. Temperature Resolution: 0.1 °C

7. Heating Control Output: DC linear power supply heating + liquid nitrogen flow controller

8. Auxiliary Functions:

• Collection and export of temperature data

• Real-time & historical temperature curve display

• Expandable vacuum readout interface

II. Functional Features

1. Wide Temperature Range Control: Supports continuous and adjustable temperature regulation from cryogenic to high-temperature conditions, meeting the testing requirements of various materials and devices.

2. High-Stability Temperature Control Stage: The sample stage delivers outstanding temperature uniformity with minor temperature fluctuations to ensure reliable test results.

3. Precision XYZ Motion Stage: Enables high-precision alignment and repeat positioning of samples and probes under variable temperature environments.

4. Multi-Probe Configuration Support: Compatible with single-probe or multi-probe synchronous testing, suitable for devices with complex structures.

5. Microscopy System Compatibility: Can be matched with stereomicroscopes or metallurgical microscopes for real-time visual observation.

6. Safety & Protection Design: Equipped with over-temperature protection and system interlock functions to safeguard the equipment and test samples.

III. Application Scenarios & Fields

1. I-V, C-V and reliability testing of semiconductor devices under high and low temperature environments.

2. Temperature-dependent performance and functional testing of MEMS devices.

3. Research on low-temperature transport properties and high-temperature stability of 2D material devices.

4. Electrical characterization of novel functional materials under variable temperature conditions.

5. Construction of variable-temperature electrical testing platforms for universities and research institutes.

IV. Typical Models and Application Cases

MEMSSchematic Diagram of Probe Test Process

Application Cases

Device appearance drawing