I. Product Overview
The Aibona CA Comprehensive Analysis Probe Station Test System is designed to meet the multi-dimensional electrical and physical property testing requirements for semiconductor devices, 2D materials, MEMS and advanced material devices. It integrates high-precision probe contact technology, stable sample loading and environmental control, as well as expandable electrical test interfaces and data acquisition capabilities, enabling comprehensive measurements ranging from standard I–V / C–V testing to low-noise, multi-channel and in-situ analysis.Centered on the core design objectives of test stability, contact reliability and platform scalability, the CH-12 model supports rapid setup and long-term repeated testing for research scenarios. It can be flexibly configured to match laboratory instrumentation systems (including source meters, LCR meters, lock-in amplifiers, low-noise amplifiers, etc.), reducing overall system integration and maintenance costs.
II. Product Features
All-in-one integrated test platform for diverse measurement tasks: supports I–V, C–V, four-probe / Van der Pauw, leakage current & breakdown voltage, pulsed electrical measurements, etc. Multi-channel I/O interfaces adapt to various test paths and shielding specifications.
High-stability mechanical structure and precision manipulation: high-rigidity frame design minimizes contact drift and vibration interference; 3-axis (XYZ) fine adjustment for probes, with optional θ rotation and tilt mechanisms; synchronous multi-probe alignment improves measurement efficiency and repeatability.
Customizable environmental and in-situ measurement capabilities (configured per experimental requirements): optional vacuum / controlled atmosphere, thermal heating & temperature regulation, illumination & optoelectronic testing; optional microscopic imaging systems (coaxial / tilted / long-working-distance types) for precise probe placement and positioning.
Low-noise and electromagnetic shielding architecture: optimized chamber shielding and grounding layout to suppress mains interference and ambient electromagnetic coupling; compatible with BNC / Triax / SMA interface combinations to meet ultra-low current and high-frequency testing requirements.
Modular architecture for easy upgrades: seamless compatibility with Keithley, Keysight and other mainstream test instruments; tiered configuration options including Teaching Version, Research Version and Advanced Version.
III. Typical Applications
Room-temperature and variable-temperature electrical characterization of semiconductor devices (MOSFETs, diodes, TFTs, power devices)
Contact resistance, carrier mobility and gate-dependent property characterization of 2D material devices (graphene, TMDs, hBN)
Parameter extraction and reliability evaluation for MEMS and micro-sensors (pressure sensors, capacitive devices, microstructures)
Illuminated I–V testing, response curve measurement and dark current analysis for optoelectronic devices (photoconductors, photovoltaic cells, photodetectors)
IV. Technical Parameters
4.1 Probe Station and Platform Parameters
Stage travel
| project | Indicators (Typical ) |
|---|
| System Type | Comprehensive Analysis Probe Station Test System (Electrical/Physical Property Test Platform) |
| Sample Size | Primarily chips/dice (2–4 inch compatible, optional) |
| XY：≥ 25 mm × 25 mm（Larger size optional）；Z：≥ 10 mm |
|
| displacement resolution | Fine-tuning resolution ≤ 1 μm (typical) |
| repetitive positioning accuracy | ≤ ±2 μm（Typical) |
| Probe Manipulator | 4–12 (optional), each supporting XYZ fine-tuning (optional theta/swing angle) |
| Probe Type | DC soft pin / hard pin; coaxial / low-noise / high-frequency probes optional |
| Observation System | Optional long working distance microscope: coaxial/tilted observation; dual-camera field of view optional |
4.2 Environment and Temperature Control (As Configured)
| project | Indicators (Typical / Optional) |
|---|
| Working Mode | Ambient air (standard) / Vacuum (optional) / Inert atmosphere (optional) |
| Vacuum Degree (Optional) | ≤ 1×10⁻³ ~ 1×10⁻⁵ Torr(According to pump unit configuration) |
| Heating Plate (Optional) | RT ~ 200/300 ℃(Higher temperature optional) |
| Temperature Control Accuracy (Optional) | ±0.1 ℃（Typical, visual sensors and thermostats) |
| Low-temperature module | Optional (e.g., closed-loop cryogenic / liquid nitrogen solutions, as required) |
4.3 Electrical Testing and Interfaces (By Configuration)
| project | Indicators (Typical / Optional) |
|---|
| Support testing | I–V / C–V / Four-Probe / Leakage Current & Breakdown / Pulsed Electrical Measurement (Optional) |
| Current magnitude capability | fA–A（depends on the source table / preamplifier） |
| Interface form | BNC（Standard configuration); Triax (low current option); SMA (high frequency option) |
| Shielding Scheme | Cavity shielding + grounding system + low-noise cables (as configured) |
Meter Compatibility| Keithley Source Meter / LCR; Keysight Source Meter / LCR; Lock-in Amplifier / Preamplifier, etc. |
|
| Software and Control | PC Software Data Acquisition and Control (Optional Scripts / Automated Measurement Procedures) |
4.4 System Specifications
| project | indicator |
|---|
| power supply | AC 220 V，50 Hz（as required） |
| working environment | 15–30 ℃；30–70% RH（(Recommended to be stored in a dry and clean environment) |
| Safety and Protection | Over-temperature / Emergency Stop / Interlock (per configuration) |
V. Delivery and Configuration Recommendations (for creating tiered models)
Basic (Teaching/Basic Testing): Ambient air environment + 4 probes + basic I–V testing; Research (Common Research Use): Heating stage / longer travel + 8–12 probes + I–V/C–V testing + low-noise cables; Advanced (Comprehensive Analysis): Vacuum / controlled atmosphere system + Triax low-current setup + pulse/high-frequency interfaces + automated measurement system
