I. Product Overview
The Aibona CB Comprehensive Analysis Probe Station Test System is developed to satisfy multi-dimensional electrical and physical property testing requirements for semiconductor devices, two-dimensional materials, MEMS and advanced material devices. It integrates high-precision probe contact technology, stable sample loading and environmental control functions, as well as expandable electrical test interfaces and data acquisition capabilities, enabling comprehensive measurements ranging from standard I–V / C–V testing to low-noise, multi-channel and in-situ analysis.Centered on the core design goals of test stability, contact reliability and platform scalability, the CB model supports rapid setup and long-term repeated testing for scientific research scenarios. It can be flexibly configured to match laboratory instrument systems (including source meters, LCR meters, lock-in amplifiers, low-noise amplifiers, etc.), so as to reduce system integration and maintenance costs.
II. System Features & Advantages
Integrated all-in-one test platform for diverse measurement tasks
Supports I–V, C–V, four-probe / Van der Pauw, leakage current & breakdown, pulsed electrical measurements, etc.
Multi-channel I/O interfaces, compatible with various test paths and shielding requirements.
High-stability mechanical structure & precision manipulation
High-rigidity platform frame to minimize contact drift and vibration interference
3-axis (XYZ) fine adjustment for probes, with optional θ rotation and tilt structures
Supports synchronous multi-probe alignment to improve measurement efficiency and repeatability
Optional environmental control & in-situ measurement capabilities (customized per experimental requirements)
Optional functions: vacuum / controlled atmosphere, heating & temperature regulation, illumination & optoelectronic testing
Optional microscopic observation systems (coaxial / tilted / long-working-distance types) for precise probe placement and positioning
Low-noise design with electromagnetic shielding
Optimized chamber shielding and grounding layout to suppress mains frequency interference and ambient electromagnetic coupling
Compatible with BNC / Triax / SMA interface combinations, meeting ultra-low current and high-frequency testing demands
Modular architecture for easy upgrades
III. Typical Applications
Room-temperature and variable-temperature electrical characterization of semiconductor devices (MOS devices, diodes, TFTs, power devices)
Characterisation of contact resistance, carrier mobility and gate-dependent properties for 2D material devices (graphene, TMDs, hBN)
Parameter extraction and reliability evaluation for MEMS and micro-sensors (pressure sensors, capacitive devices, microstructures)
Illuminated I–V testing, response curve measurement and dark current analysis for optoelectronic devices (photoconductors, photovoltaic devices, photodetectors)
IV. Technical Parameters
4.1 Probe Station and Platform Parameters
| project | Indicators (Typical ) |
|---|
| System Type | Comprehensive Analysis Probe Station Test System (Electrical/Physical Property Test Platform) |
| Sample Size | Primarily chips/dice (optional compatibility with 2–4 inch wafers) |
| Stage travel | XY：≥ 25 mm × 25 mm（Optional larger size）；Z：≥ 10 mm |
displacement resolution| Fine-tuned resolution ≤ 1 μm (typical) |
|
| Repeat Positioning Accuracy | ≤ ±2 μm（typical） |
| Probe Manipulator | 4–12 (optional), each supports XYZ fine-tuning (optional θ/swing angle) |
| Probe Type | DC soft pin / hard pin; optional coaxial / low-noise / high-frequency probes |
| Observation System | Optional long working distance microscope: coaxial/tilted observation; optional dual-camera field of view |
4.2 Environment & Temperature Control (As Configured)
| project | Indicators (Typical / Optional) |
|---|
| Working Mode | Ambient Air (Standard) / Vacuum (Optional) / Inert Atmosphere (Optional) |
| Vacuum (optional) | ≤ 1×10⁻³ ~ 1×10⁻⁵ Torr（(According to pump unit configuration) |
Heating Plate (Optional)| RT ~ 200/300 ℃（Optional higher temperature） |
|
Temperature Control Accuracy (Optional)| ±0.1 ℃（Typical, visual sensors and temperature controllers） |
|
| Low-temperature module | Optional (e.g., closed-cycle cryogenic / liquid nitrogen solutions, as required) |
4.3 Electrical Testing and Interfaces (By Configuration)
| project | Indicators (Typical / Optional) |
|---|
| Support testing | I–V / C–V / Four-Probe / Leakage Current & Breakdown / Pulsed Electrical Measurement (Optional) |
| Current magnitude capability | fA–A（depends on the source table / preamplifier） |
| Interface form | BNC（Standard configuration); Triax (low-current option); SMA (high-frequency option) |
| Blocking Scheme | cavity shielding + grounding system + low-noise cables (as configured) |
Meter compatibility| Keithley Source Meter / LCR; Keysight Source Meter / LCR; Lock-in Amplifier / Preamplifier, etc. |
|
Software and Control| PCSoftware Data Acquisition and Control (Optional Scripts / Automated Measurement Procedures)） |
|
4.4 System Specifications
| project | indicator |
|---|
| power supply | AC 220 V，50 Hz（as required） |
| working environment | 15–30 ℃；30–70% RH（Recommended storage in a dry and clean environment） |
| Safety and Protection | Over Temperature / Emergency Stop / Interlock (as configured) |
V. Delivery and Configuration Recommendations (for creating tiered models)
CH-12 Basic (Teaching / Basic Testing): Ambient atmosphere + 4 probes + Basic I–V
CH-12 Research (General Research Use): Heating stage / Longer travel + 8–12 probes + I–V/C–V + Low-noise cables
CH-12 Advanced (Comprehensive Analysis): Vacuum / Controlled atmosphere + Triax low-current setup + Pulsed / high-frequency interfaces + Automated measurement
